Loukas Michalas, Matroni Koutsoureli, Eleni Papandreou, Anestis Gantis, George Papaioannou

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MIM capacitors are considered equally important devices for the assessment of dielectric charging in RF MEMS capacitive switches.Beside the obvious similarities between the down state condition of RF MEMS and MIM capacitors there are also some important differences. The paper aims to introduce a novel approach on the study of dielectric charging in MEMS with the aid of MIM capacitors by combining experimental results obtained by the application of DC, Charging Transient and Kelvin Probe techniques.The strengths and weaknesses are discussed in conjuction with experimental results obtained on SiNx based MIM capacitors ans MEMS capacitive switches fabricated under the same conditions.

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