NUMERICAL ANALYSIS OF ZNO THIN LAYERS HAVING ROUGH SURFACE

Santolo Daliento, Pierluigi Guerriero, Maria Luisa Addonizio, Alessandro Antonaia

DOI Number
-
First page
275
Last page
286

Abstract


In this paper an automated procedure for the analysis of Transparent Conductive Oxides (TCO) layers exhibiting rough surfaces is proposed. The method is based on the interaction between MATLAB and the Sentaurus TCAD and is aimed to the reduction of computational efforts needed for full three dimensional analyses. Experiments performed on CVD deposited ZnO layer, showing the reliability of the method for describing their optical properties, are reported. A semi-empirical technique for the extraction of the TCO refractive index is shown as well.

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References


“MATLAB user’s guide” Mathworks, www.mathworks.it

Sentaurus User’s guide

S. Daliento, P.Guerriero, M.L. Addonizio, A. Antonaia E.Gambale, Refractive index measurement in TCO layers for micro optoelectronic devices,29th International Conference on Microelectronics, MIEL 2014; Belgrade; Serbia; 12 May 2014 through 14 May 2014, pp.265-268.

S.Daliento, P.Guerriero, M.L. Addonizio, A. Antonaia “Approximate analysis of optical properties for ZnO rough surfaces” 29th International Conference on Microelectronics, MIEL 2014; Belgrade; Serbia; 12 May 2014 through 14 May 2014, pp. 261-264.

M.L. Addonizio, A. Antonaia, “Enhanced electrical stability of LP-MOCVD-deposited ZnO:B layers by means of plasma etching treatment”, Journal of Physical Chemistry, 117 (46).

O. Tari, A. Aronne, M.L. Addonizio, S. Daliento, E. Fanelli, P. Pernice, “Sol-gel synthesis of ZnO transparent and conductive films: A critical approach”, Solar Energy Materials and Solar Cells” 105 , pp. 179-186, (2012)

DIN EN ISO 4287

S.J. Orfanidis "Electromagnetic Waves and Antennas" Rutgers University NJ, 1999


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ISSN: 0353-3670 (Print)

ISSN: 2217-5997 (Online)

COBISS.SR-ID 12826626