Tomislav Ciric, Zlatica Marinković, Rohan Dhuri, Olivera Pronić-Rančić, Vera Marković

DOI Number
First page
Last page


RF MEMS switches have been efficiently exploited in various applications in communication systems. As the dimensions of the switch bridge influence the switch behaviour, during the design of a switch it is necessary to perform inverse modeling, i.e. to determine the bridge dimensions to ensure the desired switch characteristics, such as the resonant frequency. In this paper a novel inverse modeling approach based on combination of artificial neural networks and a lumped element circuit model has been considered. This approach allows determination of the bridge fingered part length for the given resonant frequency and the bridge solid part length, generating at the same time values of the elements of the switch lumped element model. Validity of the model is demonstrated by appropriate numerical examples.


Artificial neural networks, inverse modeling, lumped element model, RF MEMS switch.

Full Text:



Q. J. Zhang, K. C. Gupta, Neural Networks for RF and Microwave Design, Artech House, 2000.

M. Gad-el-Hak, The MEMS Handbook Florida: CRC Pres, 2002

G. M. Rebeiz, RF MEMS Theory, Design, and Technology. New York: Wiley, 2003.

G. M. Rebeiz, J. B. Muldavin, "RF MEMS Switches and Switch Circuits," IEEE Microw. Mag., vol. 2, no. 4, pp. 59-71, December 2001.

Y. Mafinejad, A. Z. Kouzani, K. Mafinezhad, "Determining RF MEMS switch parameter by neural networks", In Proceedings of the IEEE Region 10 Conference TENCON 2009, 2009, pp. 1-5.

L. Michalas, M. Koutsoureli, E. Papandreou, A. Gantis, G. Papaioannou “A MIM capacitor study of dielectric charging for RF MEMS capacitive switches”, Facta Universitatis, Series: Electronics and Energetics, vol. 28, no. 1, pp. 113-122, 2015.

M. Koutsoureli, L. Michalas, G. Papaioannou, “Assessment of dielectric charging in micro-electro-mechanical system capacitive switches”, Facta Universitatis, Series: Electronics and Energetics, vol. 26, no. 3, pp. 239-245, 2013.

A. Napieralski, C. Maj, M. Szermer, P. Zajac, W. Zabierowski, M. Napieralska, Ł. Starzak, M. Zubert, R.Kiełbik, P. Amrozik, Z. Ciota, R. Ritter, M. Kamiński, R. Kotas, P. Marciniak, B. Sakowicz, K. Grabowski, W. Sankowski, G. Jabłoński, D. Makowski, A. Mielczarek, M. Orlikowski, M. Jankowski, P. Perek, “Recent research in VLSI, MEMS and power devices with practical application to the ITER and DREAM projects”, Facta Universitatis, Series: Electronics and Energetics, vol. 27, no. 4, pp. 561-588, 2014.

I. Jokić, M. Frantlović, Z. Đurić, M. Dukić, "RF MEMS/NEMS resonators for wireless communication systems and adsorption-desorption phase noise", Facta Universitatis, Series: Electronics and Energetics, vol. 28, no. 3, pp. 345-381, 2015.

J. Iannacci and C. Tschoban, "RF-MEMS for Future Mobile Applications: Experimental Verification of a Reconfigurable 8-Bit Power Attenuator up to 110 GHz, " Journal of Micromechanics and Microengineering (IOP-JMM), vol. 27, no. 4, pp. 1-11, Apr. 2017.

J. Iannacci, "RF-MEMS technology as an enabler of 5G: Low-loss ohmic switchtested up to 110 GHz", Sensors and Actuators A, vol. 279, pp. 624-629, 2018.

M. Donelli, J. Iannacci, "Exploitation of RF-MEMS Switches for the Design of Broadband Modulated Scattering Technique Wireless Sensors", IEEE Antennas and Wireless Propagation Letters, vol. 18, no. 1, January 2019.

E. Hamad and A. Omar, "An improved two-dimensional coupled electrostatic-mechanical model for RF MEMS switches", J. Micromech. Microeng., vol. 16, pp. 1424, 2006.

L. Vietzorreck, "EM Modeling of RF MEMS," In Proceedings of the 7th International Conference on Thermal, Mechanical and Multiphysics Simulation and Experiments in Micro-Electronics and Micro-Systems, EuroSime 2006, Como, Italy, April 24-26, 2006, pp.1-4.

Z. J. Guo, N. E. McGruer and G. G. Adams, "Modeling, simulation and measurement of the dynamic performance of an ohmic contact, electrostatically actuated RF MEMS switch", J. Micromech. Microeng, vol. 17, pp. 1899-1909, 2007.

J. Iannacci, R. Gaddi, A. Gnudi, "A Experimental Validation of Mixed Electromechanical and Electromagnetic Modeling of RF-MEMS Devices Within a Standard IC Simulation Environment", Journal of Microelectromechanical Systems, vol. 19, no. 3, pp. 526-537, 2010.


T. Ćirić, R. Dhuri, Z. Marinković, O. Pronić-Rančić, V. Marković, L. Vietzorreck, "Neural Based Lumped Element Model of Capacitive RF MEMS Switches", Frequenz, vol. 72, no. 11-12, November 2018.

Z. Marinković, T. Ćirić, T. Kim, L. Vietzorreck, O. Pronić-Rančić, M. Milijić, V. Marković, "ANN Based Inverse Modeling of RF MEMS Capacitive Switches", In Proceedings of the 11th Conference on Telecommunications in Modern Satellite, Cable and Broadcasting Services (TELSIKS 2013), Serbia, October 16-19, 2013, pp. 366-369.

Z. Marinković, V. Marković, T. Ćirić, L. Vietzorreck, O. Pronić-Rančić, "Artifical neural networks in RF MEMS switch modelling", Facta Universitatis, Series: Electronics and Energetics, vol. 29, no 2, pp. 177-191, 2016.

T. Ćirić, Z. Marinković, O. Pronić-Rančić, V. Marković, L. Vietzorreck, "ANN approach for modeling of mechanical characteristics of RF MEMS capacitive switches - an overview", Microwave Review, vol. 23, no. 1, pp. 25-34, June 2017.

Z. Marinković, T. Kim, V. Marković, M. Milijić, O. Pronić-Rančić, T. Ćirić, L. Vietzorreck, "Artificial Neural Network based Design of RF MEMS Capacitive Shunt Switches", Applied Computational Electromagnetics Society (ACES) Journal , vol. 31 no. 7, pp. 756-764, July 2016.

T. Ćirić, Z. Marinković, T. Kim, L. Vietzorreck, O. Pronić-Rančić, M. Milijić, V. Marković, "ANN based inverse electro-mechanical modeling of RF MEMS capacitive switches", In Proceedings of the XLIX Scientific Conference on Information, Communication and Energy Systems and Technologies (ICEST 2014), Niš, Serbia, June 25-27, 2014, vol. 2, pp. 127-130.

Z. Marinković, A. Aleksić, T. Ćirić, O. Pronić-Rančić, V. Marković, L. Vietzorreck, "Inverse electro-mechanical ANN model of RF MEMS capacitive switches-applicability evaluation", In Proceedings of the XLX Scientific Conference on Information, Communication and Energy Systems and Technologies (ICEST 2015), Sofia, Bulgaria, June 24-26, 2015, pp. 157-160.

T. Ćirić, Z. Marinković, M. Milijić, O. Pronić-Rančić, V. Marković, L. Vietzorreck, "Modeling of actuation voltage of RF MEMS capacitive switches based on RBF ANNs", In Proceedings of the 13th Symposium on Neural Networks and Applications (NEUREL), Belgrade, Serbia, November 22-24, 2016, pp. 119-122.

S. DiNardo, P. Farinelli, F. Giacomozzi, G. Mannocchi, R. Marcelli , B. Margesin, P. Mezzanotte, V. Mulloni, P. Russer, R. Sorrentino, F. Vitulli, L. Vietzorreck, "Broadband RF-MEMS based SPDT", In Proceedings of the European Microwave Conference 2006, Manchester, Great Britain, September 2006.

F. Giacomozzi, V. Mulloni, S. Colpo, J. Iannacci, B. Margesin, A. Faes, "A Flexible Fabrication Process for RF MEMS Devices", Romanian Journal of Information Science and Technology (ROMJIST), vol. 14, no. 3, 2011.

D. Dubuc, K. Grenier, J. Iannacci, "RF-MEMS for smart communication systems and future 5G applications", in Smart Sensors and MEMS -Intelligent Sensing Devices and Microsystems for Industrial Applications, 2nd edition, Editors: S. Nihtianov, A. Luque, Chapter 18, Elsevier Ltd. Amsterdam, NL, pp. 499-539, March 2018.

Advanced Design System 2009, Santa Rosa, CA: Electronic design automation software system produced by Keysight EEsof EDA.


  • There are currently no refbacks.

ISSN: 0353-3670