A COMPREHENSIVE OVERVIEW OF RECENT DEVELOPMENTS IN RF-MEMS TECHNOLOGY-BASED HIGH-PERFORMANCE PASSIVE COMPONENTS FOR APPLICATIONS IN THE 5G AND FUTURE TELECOMMUNICATIONS SCENARIOS
Abstract
The goal of this work is to provide an overview about the current development of radio-frequency microelectromechanical systems technology, with special attention towards those passive components bearing significant application potential in the currently developing 5G paradigm. Due to the required capabilities of such communication standard in terms of high data rates, extended allocated spectrum, use of massive MIMO (Multiple-Input-Multiple-Output) systems, beam steering and beam forming, the focus will be on devices like switches, phase shifters, attenuators, filters, and their packaging/integration. For each of the previous topics, several valuable contributions appeared in the last decade, underlining the improvements produced in the state of the art and the chance for RF-MEMS technology to play a prominent role in the actual implementation of the 5G infrastructure.
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G. Tagliapietra and J. Iannacci, “Overview of recent developments in rf-mems technology with reference to 5g emerging applications,” In Proceedings of the 1st International Conference on Micro/Nanoelectronics Devices, Circuits and Systems (MNDCS 2021), pages 1–31, 2021.
J. Iannacci, “Rf-mems: an enabling technology for modern wireless systems bearing a market potential still not fully displayed,” Microsystem Technologies, vol. 14, no. 09, 2015.
Omron Website. Omron electronic components. [online], Accessed: Nov. 19, 2020. https://www.components.omron.com/.
L. Wood, “Global radio frequency (rf) mems market 2019-2023: Expected to grow at a cagr of approx 37%, with aac technologies, analog devices, broadcom, cavendish kinetics, and qorvo at the forefront-researchandmarkets.com”, [online], Accessed: 19 November 2020, https://www.businesswire.com/news/
home/20190221005400/en/Global-Radio-Frequency-RF-MEMS-Market-2019-2023/ .
Cavendish Kinetics, “Cavendish powers nubia z9: world's first smartphone with dual antenna tuning,” [online], Accessed: 19 November 2020. https://www.cavendish-kinetics.com/release/cavendish-powers-nubia-z9-worlds-first-smartphone-with-dual-antenna-tuning/ .
J. Iannacci, “Internet of things (iot); internet of everything (ioe); tactile internet; 5g - a (not so evanescent) unifying vision empowered by eh-mems (energy harvesting mems) and rf-mems (radio frequency mems),” Sensors and Actuators A: Physical, vol. 272, no. 02, 2018.
J. Rodriguez. Fundamentals of 5G Mobile Networks. Wiley, 2015.
GSM Association. 5g spectrum - public policy position. [online], Accessed: 19 November 2020. https://www.gsma.com/spectrum/wp-content/uploads/2020/03/5G-Spectrum-Positions.pdf .
J. Iannacci, “Rf-mems technology: An enabling solution in the transition from 4g-lte to 5g mobile applications,” In 2017 IEEE SENSORS, 2017, pp. 1–3.
J. Iannacci, “Rf-mems for high-performance and widely reconfigurable passive components - a review with focus on future telecommunications, internet of things (iot) and 5g applications”, Journal of King Saud University - Science, vol. 29, no. 4, pp. 436–443, 2017. SI: Smart materials and applications of new materials.
L. Ma, N. Soin, M. H. Mohd Daut, and S. F. Wan Muhamad Hatta, “Comprehensive study on rf-mems switches used for 5g scenario”, IEEE Access, vol. 7, pp. 107506-107522, 2019.
Y. Yuan-Wei, Z. Jian, J. Shi-Xing, and Y. Shi, “A high isolation series-shunt rf mems switch”, Sensors, vol. 9, no. 6, pp. 4455–4464, 2009.
J. Sun, Z. Li, J, Zhu, Y. Yu, and L. Jiang, “Design of dc-contact rf mems switch with temperature stability”, AIP Advances, vol. 5, March 2015.
S. T. Wipf, A. Goritz, M. Wietstruck, C. Wipf, B. Tillack, and M. Kaynak, “D-band rf-mems spdt switch in a 0.13 um sige bicmos technology”, IEEE Microwave and Wireless Components Letters, vol. 26, pp. 1002–1004, 2016.
Y. Liu, Y. Bey, and X. Liu, “High-power high-isolation rf-mems switches with enhanced hotswitching reliability using a shunt protection technique”, IEEE Transactions on Microwave Theory and Techniques, vol. 65, no. 9, pp. 3188–3199, 2017.
C. Chu and X. Liao, “One to 40ghz ultra-wideband rf mems direct-contact switch based on gaas mmic technique”, IET Microwaves, Antennas Propagation, vol. 12, no. 6pp. 879–884, 2018.
S. Dey, S. Koul, A. Poddar, and U. Rohde, “Compact, broadband and reliable lateral mems switching networks for 5g communications”, Progress in Electromagnetics Research M, vol. 86 pp. 163–171, 2019.
N. Narang and P. Singh, “Metal contact rf mems switch design for high performance in ka band”, In Proceedings of the IOP Conference Series: Materials Science and Engineering, vol. 872, p. 012020, 06 2020.
H. Yang, H. Zareie, and G. M. Rebeiz, “A high power stress-gradient resilient rf mems capacitive switch”, Journal of Microelectromechanical Systems, vol. 24, no. 3, pp. 599–607, 2015.
K. Demirel, E. Yazgan, S. Demir, and T. Akin, “A folded leg ka-band rf mems shunt switch with amorphous silicon (a-si) sacrificial layer”, Microsystem Technologies, vol. 23, pp. 1191–1200, 2017.
M. Li, J. Zhao, Z. You, and G. Zhao, “Design and fabrication of a low insertion loss capacitive rf mems switch with novel micro-structures for actuation”, Solid-State Electronics, vol. 127, pp. 32–37, 2017.
G. S. Kondaveeti, K. Guha, S. R. Karumuri, and A. Elsinawi, “Design of a novel structure capacitive rf mems switch to improve performance parameters”, IET Circuits, Devices Systems, vol. 13, no. 7, pp. 1093–1101, 2019.
U. Chae, H. Y. Yu, C. Lee, and I. J. Cho, “A hybrid rf mems switch actuated by the combination of bidirectional thermal actuations and electrostatic holding”, IEEE Transactions on Microwave Theory and Techniques, vol. 68, no. 8, pp. 3461–3470, 2020.
A. Bojesomo, N. Saeed, and I. M. Elfadel, “A multiband rf mems switch with low insertion loss and cmos-compatible pull-in voltage” In Proceedings of the 2018 Symposium on Design, Test, Integration Packaging of MEMS and MOEMS (DTIP), 2018, pp. 1–4.
W. Tian, P. Li, and L.X. Yuan, “Research and analysis of mems switches in different frequency bands”, Micromachines, vol. 9, no. 04, 2018.
A. Algamili, M. Haris, Md Khir, J. Dennis, A. Ahmed, S. Omar, S. Ba Hashwan, and M. Junaid, “A review of actuation and sensing mechanisms in mems-based sensor devices”, Nanoscale Research Letters, 01 2021.
D. A. Czaplewski, C. W. Dyck, H. Sumali, J. E. Massad, J. D. Kuppers, I. Reines, W. D. Cowan, and C. P. Tigges, “A soft-landing waveform for actuation of a single-pole single-throw ohmic rf mems switch”, Journal of Microelectromechanical Systems, vol. 15, no. 6, pp. 1586–1594, 2006.
D. Peroulis, S. P. Pacheco, K. Sarabandi, and L. P. B. Katehi, “Electromechanical considerations in developing low-voltage rf mems switches”, IEEE Transactions on Microwave Theory and Techniques, vol. 51, no. 1, pp. 259–270, 2003.
S. Fouladi and R. R. Mansour, “Capacitive rf mems switches fabricated in standard 0.35-um cmos technology”, IEEE Transactions on Microwave Theory and Techniques, vol. 58, no. 2, pp. 478–486, 2010.
A. Gopalan and U. K. Kommuri, “Design and development of miniaturized low voltage triangular rf mems switch for phased array application”, Applied Surface Science, vol. 449, pp. 340–345, 2018. 4th International Conference on Nanoscience and Nanotechnology.
H. Wei, Z. Deng, X. Guo, Y. Wang, and H. Yang, “High on/off
capacitance ratio RF MEMS capacitive switches”, Journal of Micromechanics and Microengineering, vol. 7, no. 5, p. 055002, Mar 2017.
J. Iannacci, A. Repchankova, D. Macii, and M. Niessner, “A measurement procedure of technology-related model parameters for enhanced rf-mems design”, In Proceedings of the 2009 IEEE International Workshop on Advanced Methods for Uncertainty Estimation in Measurement, pp. 44–49, 2009.
J. Iannacci, “Mixed-Domain Fast Simulation of RF and Microwave MEMS-based Complex Networks within Standard IC Development Frameworks”, 04, 2010.
J.-M. Kim, J.-H. Park, C.-W. Baek, and Y.-K. Kim, “The siog-based single-crystalline silicon (scs) rf mems switch with uniform characteristics”, Journal of Microelectromechanical Systems, vol. 13, no. 6, pp. 1036–1042, 2004.
A. Persano, A. Tazzoli, P. Farinelli, G. Meneghesso, P. Siciliano, and F. Quaranta, “K-band capacitive mems switches on gaas substrate: Design, fabrication, and reliability”, Microelectronics Reliability, vol. 52, no. 9, pp. 2245–2249, 2012.
S. Touati, N. Lorphelin, A. Kanciurzewski, R. Robin, A. Rollier, O. Millet, and K. Segueni, “Low actuation voltage totally free flexible rf mems switch with antistiction system”, In Proceedings of the 2008 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, 2008, pp. 66–70.
J. Y. Park, G. H. Kim, K. W. Chung, and J. U. Bu, “Fully integrated micromachined capacitive switches for rf applications”, In Proceedings of the 2000 IEEE MTT-S International Microwave Symposium Digest (Cat. No.00CH37017), vol. 1, pp. 283–286, 2000.
A. Persano, A. Cola, G. De Angelis, A. Taurino, P. Siciliano, and F. Quaranta. “Capacitive rf mems switches with tantalum-based materials”, Journal of Microelectromechanical Systems, vol. 20, no. 2, pp. 365–370, 2011.
M. Angira, G.M. Sundram, K. Rangra, D. Bansal, and K. Maninder, “On the investigation of an interdigitated, high capacitance ratio shunt rf-mems switch for x- band applications”, 05, 2013.
V. Mulloni, F. Solazzi, G. Resta, F. Giacomozzi, and B. Margesin, “Rf-mems switch design optimization for long-term reliability” In Proceedings of the 2013 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP), 2013, pp. 1–6.
P. Blondy, A. Crunteanu, C. Champeaux, A. Catherinot, P. Tristant, O. Vendier, J. L. Cazaux, and L. Marchand, “Dielectric less capacitive mems switches”, In Proceedings of the 2004 IEEE MTT-S International Microwave Symposium Digest (IEEE Cat. No.04CH37535), vol 2, pp. 573–576, 2004.
F. Ke, J. Miao, and J. Oberhammer, “A ruthenium-based multimetal-contact rf mems switch with a corrugated diaphragm”, Journal of Microelectromechanical Systems, vol. 17, no. 6, pp. 1447–1459, 2008.
C. D. Patel and G. M. Rebeiz, “A high-reliability high-linearity high-power rf mems metal-contact switch for dc-40-ghz applications” IEEE Transactions on Microwave Theory and Techniques, vol. 60, no. 10, pp. 3096–3112, 2012.
J. Pal, Y. Zhu, J. Lu, D. Dao, and F. Khan, “High power and reliable spst/sp3t rf mems switches for wireless applications” IEEE Electron Device Letters, vol. 37, no. 9, pp. 1219–1222, 2016.
M. Fernandez-Bolanos Badia, E. Buitrago, and A. M. Ionescu, “Rf mems shunt capacitive switches using aln compared to Si3N4 dielectric”, Journal of Microelectromechanical Systems, vol. 21, no. 5, pp. 1229–1240, 2012.
C. Harendt, H. Graf, B. Hofflinger, and E. Penteker, “Silicon fusion bonding and its characterization”, Journal of Micromechanics and Microengineering, vol. 2, no. 113, 01, 1999.
W. Tian, X. Wang, J. Niu, H. Cui, Y. Chen, and Y. Zhang, “Research status of wafer level packaging for rf mems switches” In Proceedings of the 21st International Conference on Electronic Packaging Technology (ICEPT)”, 2020, pp. 1–5.
F. Giacomozzi, V. Mulloni, S. Colpo, A. Faes, G. Sordo, and S. Girardi, “Rf-mems devices packaging by using quartz caps and epoxy polymer sealing rings”, In Proceedings of the 2013 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP), 2013, pp 1–6.
T. Katsuki, T. Nakatani, H. Okuda, O. Toyoda, S. Ueda, and F. Nakazawa, “A highly reliable single-crystal silicon rf-mems switch using au sub-micron particles for wafer level ltcc cap packaging”, In Proceedings of the 2nd IEEE CPMT Symposium Japan, 2012, pp. 1–4.
S. Seok, J. Kim, M. Fryziel, N. Rolland, P. Rolland, H. Maher, W. Simon, and R. Baggen, “Wafer-level bcb cap packaging of integrated mems switches with mmic”, In Proceedings of the IEEE/MTT-S International Microwave Symposium Digest, 2012, pp. 1–3.
R. Goggin, P. Fitzgerald, B. Stenson, E. Carty, and P. McDaid, “Commercialization of a reliable rf mems switch with integrated driver circuitry in a miniature qfn package for rf instrumentation applications” In Proceedings of the IEEE MTT-S International Microwave Symposium, 2015, pp. 1–4.
I. Comart, C. Cetintepe, E. Sagiroglu, S. Demir, and T. Akin, “Development and modeling of a wafer-level bcb packaging method for capacitive rf mems switches”, Journal of Microelectromechanical Systems, vol. 28, no. 4, pp. 724–731, 2019.
F. Barriere, A. Crunteanu, A. Bessaudou, A. Pothier, F. Cosset, D. Mardivirin, and P. Blondy. Zero level metal thin film package for rf mems. In 2010 Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems (SiRF), pages 148-151, 2010.
K. Nadaud, F. Roubeau, A. Pothier, P. Blondy, L. Zhang, and R. Stefanini, “High q zero level packaged rf-mems switched capacitor arrays”, In Proceedings of the 11th European Microwave Integrated Circuits Conference (EuMIC), 2016, pp. 448–451.
F. Souchon, D. Saint-Patrice, J. L. Pornin, D. Bouchu, C. Baret, and B. Reig, “Thin film packaged redundancy rf mems switches for space applications, In Proceedings of the 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 2017, pp. 175–178.
S. T. Wipf, A. Goritz, M. Wietstruck, C. Wipf, B. Tillack, A. Mai, and M. Kaynak, “Thin film wafer level encapsulated rf-mems switch for d-band applications” In Proceedings of the 11th European Microwave Integrated Circuits Conference (EuMIC), 2016, pp. 452–455.
N. Belkadi, K. Nadaud, C. Hallepee, D. Passerieux, and P. Blondy, Zero-level packaged rf-mems switched capacitors on glass substrates, Journal of Microelectromechanical Systems, vol. 29, no. 1pp. 109–116, 2020.
A. Persano, F. Quaranta, A. Taurino, P. Siciliano, and J. Iannacci, “Thin film encapsulation for rf mems in 5g and modern telecommunication systems”, Sensors, vol. 20, pp. 1–12, 04, 2020.
A. Malczewski, S. Eshelman, B. Pillans, J. Ehmke, and C. L. Goldsmith, “X-band rf mems phase shifters for phased array applications”, IEEE Microwave and Guided Wave Letters, vol. 9, no. 12, pp. 517–519, 1999.
S. Barker and G. M. Rebeiz, “Distributed mems true-time delay phase shifters and wide-band switches”, IEEE Transactions on Microwave Theory and Techniques, vol. 46, no. 11, pp. 1881–1890, 1998.
A. S. Nagra and R. A. York, “Distributed analog phase shifters with low insertion loss”, IEEE Transactions on Microwave Theory and Techniques, vol. 47, no. 9, pp. 1705–1711, 1999.
S. Koul and S. Dey, “Radio Frequency Micromachined Switches, Switching Networks, and Phase Shifters”, CRC Press, May 2019.
Y.A. Wang, “RF MEMS Switches and Phase Shifters for 3D MMIC Phased Array Antenna Systems”, University of Cincinnati, 2002.
A. Chakraborty and B. Gupta, “Paradigm phase shift: Rf mems phase shifters: An overview”, IEEE Microwave Magazine, vol. 18, no. 1, pp. 22–41, 2017.
G. M. Rebeiz, Guan-Leng Tan, and J. S. Hayden, “Rf mems phase shifters: design and applications”, IEEE Microwave Magazine, vol. 3, no. 2, pp. 72–81, 2002.
J. Lampen, S. Majumder, C. Ji, and J. Maciel, “Low-loss, mems based, broadband phase shifters”, In Proceedings of the IEEE International Symposium on Phased Array Systems and Technology, 2010, pp. 219–224.
R. Malmqvist, C. Samuelsson, B. Carlegrim, P. Rantakari, T. Vaha-Heikkilla, A. Rydberg, and J. Varis, “Ka-band rf mems phase shifters for energy starved millimetre-wave radar sensors”, In Proceedings of the CAS (International Semiconductor Conference), 2010, vol. 1, pp. 261–264.
T. Watanabe, R. Yamazaki, T. Furutsuka, S. Tanaka, and K. Suzuki, “A quasi-millimeter wave band phase shifter with mems shunt switches” In Proceedings of the Asia-Pacic Microwave Conference, 2014, pp. 64–66.
Y. Huang, J. Bao, X. Li, Y. Wang, and Y. Du, “A 4-bit switched-line phase shifter based on mems switches” In Proceedings of the 10th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, 2015, pp. 405–408.
S. Dey and S. K. Koul, “Reliability analysis of ku-band 5-bit phase shifters using mems sp4t and spdt switches”, IEEE Transactions on Microwave Theory and Techniques, vol. 63, no. 12, pp. 3997-4012, 2015.
S. Koul, S. Dey, A. Poddar, and U. Rohde, “Ka-band reliable and compact 3-bit true-time-delay phase shifter using mems single-pole-eight-throw switching networks”, Journal of Micromechanics and Microengineering, vol. 26, 08 2016.
S. K. Koul, S. Dey, A. K. Poddar, and U. L. Rohde, “Micromachined switches and phase shifters for transmit/receive module applications”, In Proceedings of the 46th European Microwave Conference (EuMC), 2016, pp. 971–974.
J. Iannacci, G. Resta, A. Bagolini, F. Giacomozzi, E. Bochkova, E. Savin, R. Kirtaev, A. Tsarkov, and M. Donelli, “Rf-mems monolithic k and ka band multistate phase shifters as building blocks for 5g and internet of things (iot) applications”, Sensors, vol. 20, no. 13, 05, 2020.
J. Reinke, L.Wang, G. K. Fedder, and T. Mukherjee, “A 4-bit rf mems phase shifter monolithically integrated with conventional cmos”, In Proceedings of the IEEE 24th International Conference on Micro ElectroMechanical Systems, 2011, pp. 748–751.
Y. Lin, Y. Chou, and C. Chang, “A balanced digital phase shifter by a novel switching-mode topology”, IEEE Transactions on Microwave Theory and Techniques, vol. 61, no. 6, 2361–2370, 2013.
M. Bakri-Kassem and R. R. Mansour, “A novel self collapsed corrugated mems phase shifter”, In Proceedings of the 2013 European Microwave Integrated Circuit Conference, 2013, pp. 360–363.
A. Razeghi and B. A. Ganji, “An improved switched-line phase shifter using distributed mems transmission line”, Majlesi Journal of Telecommunication Devices, vol. 4, no. 3, Nov. 2015.
A. Chakraborty and B. Gupta, “Utility of rf mems miniature switched capacitors in phase shifting applications”, AEU - International Journal of Electronics and Communications, vol. 75, 03 2017.
S. Afrang, K. Samandari, and G. Rezazadeh, “A small size ka band six-bit dmtl phase shifter using new design of mems switch”, Microsystem Technologies, vol. 23, 06 2017.
S. Dey and S. Koul, “Design, development and characterization of an x-band 5 bit dmtl phase shifter using an inline mems bridge and mam capacitors”, Journal of Micromechanics and Microengineering, vol. 24, 09 2014.
S. Dey and S. Koul, “10-25 ghz frequency reconfigurable mems 5-bit phase shifter using push-pull actuator based toggle mechanism”, Journal of Micromechanics and Microengineering, vol. 25, 2015.
S. Dey, S. Koul, A. Poddar, and U. Rohde, “Ku to v-band 4-bit mems phase shifter bank using high isolation sp4t switches and dmtl structures”, Journal of Micromechanics and Microengineering, vol. 27, p. 105010, 2017.
A. S. Abdellatif, M. Faraji-Dana, N. Ranjkesh, A. Taeb, M. Fahimnia, S. Gigoyan, and S. Safavi- Naeini, “Low loss, wideband, and compact cpw-based phase shifter for millimeter-wave applications”, IEEE Transactions on Microwave Theory and Techniques, vol. 62, no. 12, pp. 3403–3413, 2014.
S. Dey, S. K. Koul, A. K. Poddar, and U. L. Rohde, “Reliable and compact 3- and 4-bit phase shifters using mems sp4t and sp8t switches”, Journal of Microelectromechanical Systems, vol. 27, no. 1, pp. 113–124, 2018.
W. Tian, Y. Zhang, M. Li, Z. Xie, and W. Li, “5-bit spiral distributed rf mems phase shifter. In 2019 IEEE 19th International Conference on Nanotechnology (IEEE-NANO)”, 2019, pp. 94–98.
B. Belenger, B. Espana, S. Courreges, P. Blondy, O. Vendier, D. Langrez, and J. Cazaux, “A high-power ka-band rf-mems 2-bit phase shifter on sapphire substrate”, In Proceedings of the 6th European Microwave Integrated Circuit Conference, 2011, pp 164–167.
B. Pillans, L. Coryell, A. Malczewski, C. Moody, F. Morris, and A. Brown, “Advances in rf mems phase shifters from 15 ghz to 35 ghz”, In Proceedings of the IEEE/MTT-S International Microwave Symposium Digest, 2012, pp. 1–3.
C. Ko, K. M. J. Ho, and G. M. Rebeiz, “An electronically-scanned 1.8-2.1 ghz base-station antenna using packaged high-reliability rf mems phase shifters”, IEEE Transactions on Microwave Theory and Techniques, vol. 61, no. 2, pp. 979–985, 2013.
X. Li, K. Y. Chan, and R. Ramer, “E-band rf mems differential reflection-type phase shifter”, IEEE Transactions on Microwave Theory and Techniques, vol. 67, no. 12, pp. 4700–4713, 2019.
O. D. Gurbuz and G. M. Rebeiz, “A 1.6{2.3-ghz rf mems reconfigurable quadrature coupler and its application to a 360 reflective-type phase shifter”, IEEE Transactions on Microwave Theory and Techniques, vol. 63, no. 2, pp. 414–421, 2015.
P. K. Shrivastava, S. K. Koul, and M. P. Abegaonkar, “Compact k-band lange coupler based 2-bit rf mems reflection-type phase shifter”, In Proceedings of the 2018 IEEE MTT-S International Microwave and RF Conference (IMaRC), 2018, pp. 1–4.
T. Singh, N. K. Khaira, and R. R. Mansour, “Thermally actuated soi rf mems-based fully integrated passive reflective-type analog phase shifter for mmwave applications”, IEEE Transactions on Microwave Theory and Techniques, pp. 1–4, 2020.
J. Iannacci, F. Giacomozzi, S. Colpo, B. Margesin, and M. Bartek, “A general purpose reconfigurable mems-based attenuator for radio frequency and microwave applications”, In Proceedings of the IEEE EUROCON 2009, 2009, pp. 1197–1205.
J. Iannacci, A. Faes, F. Mastri, D. Masotti, and V. Rizzoli, “A mems-based wideband multi-state power attenuator for radio frequency and microwave applications”, In Proceedings of the TechConnect World, NSTI Nanotech 2010, vol. 2, pp. 328–331.
X. Guo, Z. Gong, Q. Zhong, X. Liang, and Z. Liu, “A miniaturized reconfigurable broadband attenuator based on rf mems switches”, Journal of Micromechanics and Microengineering, vol. 26, p. 074002, 2016.
J. Sun, J. Zhu, L. Jiang, Y. Yu, and Z. Li, “A broadband dc to 20 ghz 3-bit mems digital attenuator”, Journal of Micromechanics and Microengineering, vol. 26, p. 055005, 05 2016.
J. Iannacci, M. Huhn, C. Tschoban, and H. Potter, “Rf-mems technology for future mobile and high-frequency applications: Reconfigurable 8-bit power attenuator tested up to 110 ghz”, IEEE Electron Device Letters, vol. 37, no. 12, pp. 1646–1649, 2016.
A. Raeesi, H. Al-Saedi, A. Palizban, A. Taeb, W. M. Abdel-Wahab, S. Gigoyan, and S. Safavi-Naeini, “Low-cost planar rf mems-based attenuator”, In Proceedings of the IEEE MTT-S International Microwave Symposium (IMS), 2019, pp. 869–872.
N. K. Khaira, T. Singh, and R. R. Mansour, “Rf mems based 60 ghz variable attenuator”, In Proceedings of the IEEE MTT-S International Microwave Workshop Series on Advanced Materials and Processes for RF and THz Applications (IMWS-AMP), 2018, pp. 1–3.
X. Liu, “Tunable rf and microwave filters”, In Proceedings of the IEEE 16th Annual Wireless and Microwave Technology Conference (WAMICON), 2018, pp 1–5.
A. Jaimes-Vera, I. Llamas-Garro, A. Corona-Chavez, and I. Zaldivar-Huerta, “Review on microwave and millimeter filters using mems technology”, In Proceedings of the 17th International Conference on Electronics, Communications and Computers (CONIELECOMP'07), 2007, pp. 26–30.
K. Thialagavthi and M. Balakumar, “Review on rf tunable filters”, International Journal of Innovations in Engineering and technology (IJIET), 04 2017.
F. Lin and M. Rais-Zadeh, “Tunable RF MEMS Filters: A Review”, Encyclopedia of Nanotechnology, pp. 4233–4243, 01 2016.
J. Brank, J. Yao, M. Eberly, A. Malczewski, K. Varian, and C. Goldsmith, “Rf mems-based tunable filters”, International Journal of RF and Microwave Computer-Aided Engineering, vol. 11, no. 5, pp. 276–284, 2001.
Z. Brito-Brito, J. Reyes, and I. Llamas-Garro, “Recent advances in reconfigurable microwave filters”, SBMO/IEEE MTT-S International Microwave and Optoelectronics Conference Proceedings, 10 2011.
L. Pelliccia, F. Cacciamani, P. Farinelli, and R. Sorrentino, “High-q tunable waveguide filters using ohmic rf mems switches”, IEEE Transactions on Microwave Theory and Techniques, vol. 63, 10, pp. 3381–3390, 2015.
L. Gong, K. Y. Chan, and R. Ramer, “A four-state iris waveguide bandpass filter with switchable irises”, 2017 IEEE MTT-S International Microwave Symposium (IMS), 2017, pp. 260–263.
Z. Yang and D. Peroulis, “A 20{40 ghz tunable mems bandpass filter with enhanced stability by gold-vanadium micro-corrugated diaphragms”, In Proceedings of the IEEE MTT-S International Microwave Symposium (IMS), 2016, pp. 1–3.
Z. Yang, D. Psychogiou, and D. Peroulis, “Design and optimization of tunable silicon-integrated evanescent-mode bandpass filters”, IEEE Transactions on Microwave Theory and Techniques, vol. 66, no. 4, pp. 1790–1803, 2018.
M. Abdelfattah, D. Psychogiou, Z. Yang, and D. Peroulis, “V-band frequency reconfigurable cavity-based bandpass filters”, In Proceedings of the 2016 IEEE/ACES International Conference on Wireless Information Technology and Systems (ICWITS) and Applied Computational Electromagnetics (ACES), 2016, pp. 1–2.
M. Agaty, A. Crunteanu, C. Dalmay, and P. Blondy, “Ku band high-q tunable cavity filters using mems and vanadium dioxide (vo2) tuners”, In Proceedings of the 2018 IEEE MTT-S International Microwave Workshop Series on Advanced Materials and Processes for RF and THz Applications (IMWS-AMP), 2018, pp 1–3.
J. Chang, M. J. Holyoak, G. K. Kannell, M. Beacken, M. Imboden, and D. J. Bishop, “High performance, continuously tunable microwave filters using mems devices with very large, controlled, out-of-plane actuation”, Journal of Microelectromechanical Systems, vol. 27, no. 6, pp. 1135–1147, 2018.
J. Jiang and R. R. Mansour, “High-q tunable filter with a novel tuning structure”, In Proceedings of the 11th European Microwave Integrated Circuits Conference (EuMIC), 2016, pp. 436–439, 2016.
T. R. Jones and M. Daneshmand, “Miniaturized folded ridged quarter-mode substrate integrated waveguide rf mems tunable bandpass filter”, IEEE Access, vol. 8, pp. 115837–115847, 2020.
S. Shirin Saberhosseini, B. A. Ganji, and A. Ghorbani, “Tunable and dual-band hmsiw resonator using rf mems capacitor”, In Proceedings of the Iranian Conference on Electrical Engineering (ICEE), 2017, pp 279–282.
B. Pradhan and B. Gupta, “Ka-band tunable filter using metamaterials and rf mems varactors”, Journal of Microelectromechanical Systems, vol. 24, no. 5, pp. 1453–1461, 2015.
R. Kuriakose and E. S. Shajahan, “Tunable bandstop filter based on cascaded spiral shaped defected ground plane cpw”, In Proceedings of the International Conference on Smart Electronics and Communication (ICOSEC), 2020, pp. 945–949.
K. N. Jose and M. R. Baiju, “A tunable cpw spurline filter employing distributed mems switches”, In Proceedings of the IEEE Students' Technology Symposium (TechSym), 2016, pp. 235–239.
R. Kumar, U. Sharma, and P. Jain, “Dmtl filter in ku-band with improved slope of attenuation after cut-off”, In Proceedings of the 5th International Conference on Signal Processing and Integrated Networks (SPIN), 2018, pp. 569–574.
T. Lin, K. K. Wei Low, R. Gaddi, and G. M. Rebeiz, “High-linearity 5.3-7.0 ghz 3-pole tunable bandpass filter using commercial rf mems capacitors”, In Proceedings of the 48th European Microwave Conference (EuMC), 2018, pp. 555–558.
A. J. Alazemi and G. M. Rebeiz, “A low-loss 1.4-2.1 ghz compact tunable three-pole filter with improved stopband rejection using rf-mems capacitors”, In Proceedings of the IEEE MTT-S International Microwave Symposium (IMS), 2016, pp 1–4, 2016.
K. Motoi, N. Oshima, M. Kitsunezuka, and K. Kunihiro, “A band-switchable and tunable nested bandpass filter with continuous 0.4-3ghz coverage”, In Proceedings of the 46th European Microwave Conference (EuMC), 2016, pp. 1421–1424.
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