PERIODIC SOLUTION OF A MICRO-ELECTROMECHANICAL SYSTEM

Ji-Huan He

DOI Number
https://doi.org/10.22190/FUME240603034H
First page
187
Last page
198

Abstract


 This paper examines the periodic motion of the micro-electro-mechanical system (MEMS), which is governed by a singularity that makes it challenging to find an exact solution and to understand its dynamical properties. This paper applies the frequency formulation to gain insight into the frequency-amplitude relationship of the system. It is found that when the amplitude reaches a threshold value, the periodic motion becomes pull-in instability. This finding simplifies the warning system for the system’s unsafe operating conditions, and the frequency-amplitude relationship can be used for optimal design of the system with high accuracy and high reliability.


Keywords

MEMS systems, Variational theory, Nonlinear oscillator

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References


Iannacci, J., 2023, Modelling, validation and experimental analysis of diverse RF-MEMS ohmic switch designs in view of beyond-5G, 6G and future networks—Part 1, Sensors, 23, 3380.

Zhang, X.S., Kwon, K., Henriksson, J., Luo, J.H., Wu, M.C., 2022, A large-scale microelectromechanical-systems-based silicon photonics LiDAR, Nature, 603, 253-258.

He, J.H., He, C.H., Qian, M.Y., Alsolami, A.A., 2024, Piezoelectric Biosensor based on ultrasensitive MEMS system, Sensors and Actuators A: Physical, 376, 115664.

Valles, A.E., Alva, V.R., Belokonov, I., 2023, Calibration method of MEMS gyroscopes using a robot manipulator, Aerospace and Electronic System Magazine, 38(3), pp. 20-27.

Middlemiss, R.P., Samarelli, A., Paul, D.J., et al., 2016, Measurement of the Earth tides with a MEMS gravimeter, Nature, 531 , pp. 614-617.

Gu, W., Hou, C.Y., Zhang, Q.H., et al., 2019, Present situation and development trend of intelligent garment, Journal of Donghua University (Natural Science), 45(6), pp. 837-843.

Zheng, C., Zou, Y.L., Hu, J.Y., 2021, et al. Research advances in wearable NFC fabric antenna and energy transfer, Journal of Donghua University (Natural Science), 47(5), pp. 37-46.

Mikhasev, G., Radi, E., Misnik, V., 2024, Modeling pull-in instability of CNT nanotweezers under electrostatic and van der Waals attractions based on the nonlocal theory of elasticity, International Journal of Engineering Science, 195, 104012.

Tian, D., Ain, Q.T., Anjum, N., et al.,, 2021, Fractal N/MEMS: from pull-in instability to pull-in stability, Fractals, 29(2), 2150030.

Yang, Q., 2023, A mathematical control for the pseudo-pull-in stability arising in a micro-electromechanical system, Journal of Low Frequency Noise, Vibration and Active Control, 42(2), pp. 927-934.

Ghommem, M., Hemid, M., Alattar, B., et al., Development of MEMS gas sensors equipped with metal organic frameworks, Sensors and Actuators A: Physical, 371, 115296.

Shubham, S., Nawaz, M., Song, X., et al., 2024, A behavioral nonlinear modeling implementation for MEMS capacitive microphones, Sensors and Actuators A: Physical, 371, 115294.

Wang, C.L. and Madou, M., 2005, From MEMS to NEMS with carbon, Biosensors & Bioelectronics, 20(10), pp. 2181-2187.

Liu, X.Y., Whalen, A.J., Kim, K., et al., 2023, MEMS micro-coils for magnetic neurostimulation, Biosensors & Bioelectronics, 227, 115143.

Manai, R., Scorsone, E., Rousseau, L., et al., 2014, Grafting odorant binding proteins on diamond bio-MEMS, Biosensors & Bioelectronics, 60, pp. 311-317.

Yang, Y., Dai, Z.H., Chen, Y., et al., 2024, Emerging MEMS sensors for ocean physics: Principles, materials, and applications, Applied Physics Reviews, 11(2), 021320.

Qin, X., Tang, L.D., 2024, An Environmental Monitoring Method of Ancient Buildings Based on the Micro Electro Mechanical System Accelerometers, Journal of Nanoelectronics and Optoelectronics, 19(1) , pp. 36-45.

Feng, G.Q., Zhang, L., Tang, W., 2023, Fractal pull-in motion of electrostatic MEMS resonators by the variational iteration method, Fractals, 31(9), 2350122.

Anjum, N., Rasheed, A., He, J.H., Alsolami, A.A., 2024, Free Vibration of a Tapered Beam by the Aboodh Transform-based Variational Iteration Method, Journal of Computational Applied Mechanics, 55(3), pp. 440-450.

He, C.H., El-Dib, Y.O., 2022, A heuristic review on the homotopy perturbation method for non-conservative oscillators, Journal of Low Frequency Noise, Vibration & Active Control, 41(2), pp. 572-603.

Ma, H.J., 2022, Simplified Hamiltonian-based frequency-amplitude formulation for nonlinear vibration systems, Facta Universitatis-Series Mechanical Engineering, 20(2), pp. 445-455.

Fu, Y., Zhang, J., Wan, L., 2011, Application of the energy balance method to a nonlinear oscillator arising in the microelectromechanical system (MEMS), Current Applied Physics, 11(3), pp. 482-485

He, J.H., 2019, The simplest approach to nonlinear oscillators. Results Phys., 15,102546.

Zhong, X.J., Li, W.L., Gao, X., et al., 2024, Preparation and output performance of triboelectric nanogenerator based on electrospun PVDF/GO composite nanofibers, Journal of Donghua University (Natural Science), 50(3), pp. 15-22.

Skrzypacz, P., Kadyrov, S., Nurakhmetov, D., et al., 2019, Analysis of dynamic pull-in voltage of a graphene MEMS model. Nonlinear Anal Real World Appl , 45, pp. 581–589.

He, C.H., 2023, A variational principle for a fractal nano/microelectromechanical (N/MEMS) system, Int. J. Numer. Method. H., 33(1), pp. 351-359.

Zuo, Y.T., 2024, Variational principle for a fractal lubrication problem, Fractals, doi: 10.1142/S0218348X24500804.

Wang, K.L., He, C.H., 2019, A remark on Wang’s fractal variational principle, Fractals, 27(8), 1950134.

He, C.H., Liu, C., 2023, Variational principle for singular waves, Chaos, Solitons & Fractals, 172, 113566.

He, C.H., Liu, C., 2022, A modified frequency-amplitude formulation for fractal vibration systems, Fractals, 30(3): 2250046.

Tian, Y., 2022, Frequency formula for a class of fractal vibration system, Reports in Mechanical Engineering, 3(1), pp. 55-61.

Niu, J.-Y., Feng, G.-Q., Gepreel, K.A., 2023, A simple frequency formulation for fractal–fractional non-linear oscillators: A promising tool and its future challenge. Front. Phys. 11, 1158121.

El-Dib, Y.O., 2024, A review of the frequency-amplitude formula for nonlinear oscillators and its advancements. Journal of Low Frequency Noise, Vibration and Active Control, doi:10.1177/14613484241244992.




DOI: https://doi.org/10.22190/FUME240603034H

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ISSN: 0354-2025 (Print)

ISSN: 2335-0164 (Online)

COBISS.SR-ID 98732551

ZDB-ID: 2766459-4