VIBRATION PHENOMENA INDUCED BY PULSED LASER HEATING OF MICROMECHANICAL CANTILEVER: INFLUENCE OF LASER-PULSE TEMPORAL SHAPE

Slobodanka Galović, Katarina Đorđević, Mladena Lukić, Dalibor Chevizovich

DOI Number
https://doi.org/10.22190/FUWLEP241028045G
First page
465
Last page
476

Abstract


Illumination-induced vibrational phenomena can significantly affect the mechanical behavior of micro-mechanical sensors (MEMS) and, consequently, the noise performance of detectors based on these sensors. In this paper, we study thermoelastic deflection induced by photothermal heating of a solid micro-mechanical cantilever illuminated by a short square laser pulse. An analytical-numerical technique based on the Laplace transform is employed to calculate the spectral function of lateral deflection. The results indicate that the profile of laser-induced vibrations depends on the temporal shape of the excitation optical pulse. The square pulse enhances the increasing trend of the high-frequency lateral vibration amplitude peak if cantilever thickness increases suggesting the possibility of size-dependent engineering of the properties of detectors utilizing micro-mechanical cantilevers.


Keywords

photothermal effect, generalized thermoelasticity, cantilever, micro resonator, nano electro-mechanical systems

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References


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DOI: https://doi.org/10.22190/FUWLEP241028045G

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